The MID Flow Sensor can be used as a differential pressure sensor in bypass as well as in direct operation. It offers a higher accuracy at a lower power consumption (< 10 mW). The Sensor can be used for gas as well as liquids. The maximum volumetric flow in direct operation is for example 20 ml/min for air. With the SMD/MID concept a highly integrated and extremely precise sensor can be realised for standard handling of electronic devices. At the same time the flexibility of usage is considerably higher. Initial uses of climate/air conditioning units have been successful. Possible applications, among others, are in medicine technology or in the automotive sector.